Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

Jian Xu; Katsumi Midorikawa; Koji Sugioka

doi:10.1117/12.2038187

6 March 2014 Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

Jian Xu, Katsumi Midorikawa, Koji Sugioka

Author Affiliations +

Proceedings Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; 896709 (2014) https://doi.org/10.1117/12.2038187
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

A simple and flexible technique for integrating metal micropatterns into glass microfluidic structures based on threedimensional femtosecond laser microfabrication is presented. Femtosecond laser direct writing followed by thermal treatment and successive chemical etching allows us to fabricate three-dimensional microfluidic structures such as microchannels and microreservoirs inside photosensitive glass. Then, the femtosecond laser direct-write ablation followed by electroless metal plating enables space-selective deposition of patterned metal films on desired locations of internal walls of the fabricated microfluidic structures. The developed technique is applied to integrate a metal microheater into a glass microchannel to control the temperature of liquid samples in the channel, which can be used as a microreactor for enhancement of chemical reactions.

Citation Download Citation

Jian Xu, Katsumi Midorikawa, and Koji Sugioka "Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 896709 (6 March 2014); https://doi.org/10.1117/12.2038187

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