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Proceedings Article

Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms

[+] Author Affiliations
Tyler Bell, Song Zhang

Iowa State Univ. (United States)

Proc. SPIE 8979, Emerging Digital Micromirror Device Based Systems and Applications VI, 897907 (March 7, 2014); doi:10.1117/12.2035270
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From Conference Volume 8979

  • Emerging Digital Micromirror Device Based Systems and Applications VI
  • Michael R. Douglass; Philip S. King; Benjamin L. Lee
  • San Francisco, California, United States | February 01, 2014

abstract

This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results. © (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Tyler Bell and Song Zhang
" Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms ", Proc. SPIE 8979, Emerging Digital Micromirror Device Based Systems and Applications VI, 897907 (March 7, 2014); doi:10.1117/12.2035270; http://dx.doi.org/10.1117/12.2035270


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