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Proceedings Article

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

[+] Author Affiliations
Jan-Uwe Schmidt, Ulrike A. Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger

Fraunhofer-Institut für Photonische Mikrosysteme (Germany)

Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Micronic Mydata AB (Sweden)

Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770O (March 7, 2014); doi:10.1117/12.2036533
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From Conference Volume 8977

  • MOEMS and Miniaturized Systems XIII
  • Wibool Piyawattanametha; Yong-Hwa Park
  • San Francisco, California, United States | February 01, 2014

abstract

Fraunhofer IPMS has developed a one-dimensional high-speed spatial light modulator in cooperation with Micronic Mydata AB. This SLM is the core element of the Swedish company’s new LDI 5sp series of Laser-Direct-Imaging systems optimized for processing of advanced substrates for semiconductor packaging. This paper reports on design, technology, characterization and application results of the new SLM. With a resolution of 8192 pixels that can be modulated in the MHz range and the capability to generate intensity gray-levels instantly without time multiplexing, the SLM is applicable also in many other fields, wherever modulation of ultraviolet light needs to be combined with high throughput and high precision. © (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Jan-Uwe Schmidt ; Ulrike A. Dauderstaedt ; Peter Duerr ; Martin Friedrichs ; Thomas Hughes, et al.
" High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications ", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770O (March 7, 2014); doi:10.1117/12.2036533; http://dx.doi.org/10.1117/12.2036533


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