High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt; Ulrike A. Dauderstaedt; Peter Duerr; Martin Friedrichs; Thomas Hughes; Thomas Ludewig; Dirk Rudloff; Tino Schwaten; Daniela Trenkler; Michael Wagner; Ingo Wullinger; Andreas Bergstrom; Peter Bjoernangen; Fredrik Jonsson; Tord Karlin; Peter Ronnholm; Torbjorn Sandstrom

doi:10.1117/12.2036533

7 March 2014 High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike A. Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Author Affiliations +

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770O (2014) https://doi.org/10.1117/12.2036533
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Fraunhofer IPMS has developed a one-dimensional high-speed spatial light modulator in cooperation with Micronic Mydata AB. This SLM is the core element of the Swedish company’s new LDI 5sp series of Laser-Direct-Imaging systems optimized for processing of advanced substrates for semiconductor packaging. This paper reports on design, technology, characterization and application results of the new SLM. With a resolution of 8192 pixels that can be modulated in the MHz range and the capability to generate intensity gray-levels instantly without time multiplexing, the SLM is applicable also in many other fields, wherever modulation of ultraviolet light needs to be combined with high throughput and high precision.

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Jan-Uwe Schmidt, Ulrike A. Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, and Torbjorn Sandstrom "High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications ", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770O (7 March 2014); https://doi.org/10.1117/12.2036533

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