Functional metal oxide nanostructures fabricated by 3D-nanotemplate PLD

Azusa N. Hattori; Hidekazu Tanaka

doi:10.1117/12.2044357

8 March 2014 Functional metal oxide nanostructures fabricated by 3D-nanotemplate PLD

Azusa N. Hattori, Hidekazu Tanaka

Proceedings Volume 8987, Oxide-based Materials and Devices V; 89871X (2014) https://doi.org/10.1117/12.2044357
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

By combining inclined pulsed-laser deposition (PLD) with nanoimprint lithography, an original three-dimensional (3D) nanofabrication technique, namely “3D nanotemplate PLD technique E has been established. 3D nanotemplate PLD enables to fabricate the large arrays of programmable ZnO nanostructures: nanoboxes and nanowires with a width of 20nm. Cathodoluminescence (CL) measurements at 300K showed an intense luminescence peak around 380 nm corresponding to near-band-edge (NBE) emission from even a single ZnO nanobox. The CL intensity mapping also showed the brilliant NBE luminescence from the entire single ZnO nanobox. The architecturally designed ZnO nanostructures with an excellent wide-gap luminescent semiconductor character should be good candidates for optoelectronic materials for nanoscale device applications.

Citation Download Citation

Azusa N. Hattori and Hidekazu Tanaka "Functional metal oxide nanostructures fabricated by 3D-nanotemplate PLD", Proc. SPIE 8987, Oxide-based Materials and Devices V, 89871X (8 March 2014); https://doi.org/10.1117/12.2044357

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