Photoresist analysis to investigate LWR generation mechanism

Kenji Mochida; Shinichi Nakamura; Tooru Kimura; Kazuki Kawai; Yoshihiko Taguchi; Naoki Man; Hideki Hashimoto

doi:10.1117/12.2045864

27 March 2014 Photoresist analysis to investigate LWR generation mechanism

Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuki Kawai, Yoshihiko Taguchi, Naoki Man, Hideki Hashimoto

Proceedings Volume 9051, Advances in Patterning Materials and Processes XXXI; 90511Q (2014) https://doi.org/10.1117/12.2045864
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

In order to understand the mechanism of line width roughness (LWR) generation and to find control knobs for improving resist patterning properties, we developed precise direct analysis method of resist patterns. This method comprise three important processes: 1. Selective sampling of resist pattern surface and pattern core, 2. Analysis and preparative isolation of collected resist ingredient by μGPC, 3. Structural analysis by Py-GC/MS. μGPC and Py-GC/MS analysis provid resist ingredient distribution information inside resist pattern, which includes original polymer, reacted polymer, and photo acid generator (PAG) through the ArF patterning process. This novel analytical method can provide remarkably helpful information about identifying proper control knobs for lithographic performance of ArF resist and for next generation lithography (NGL), especially extreme ultra violet lithography (EUVL) materials, where exposure tool time is very limited.

Citation Download Citation

Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuki Kawai, Yoshihiko Taguchi, Naoki Man, and Hideki Hashimoto "Photoresist analysis to investigate LWR generation mechanism", Proc. SPIE 9051, Advances in Patterning Materials and Processes XXXI, 90511Q (27 March 2014); https://doi.org/10.1117/12.2045864

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