In this report, morphology of cylinders by block copolymer (BCP) in the corner rounded rectangle guide patterns is
analyzed by simulation and compared with experimental results. In the case of the hole-multiplication, selection the
guide pattern size and the affinity of wall and under layer is necessary for stable micro structure. To search the good
guide conditions, Ohta-Kawasaki (OK) model and dissipative particle dynamics (DPD) are used. OK model is well
known as low cost simulation method, therefore it is expected to use for searching the good guide area roughly from
wide range. DPD is one of the strong candidates for DSA simulation, and it is used for prediction of the micro structure.
As results, the guide size area which has two PMMA cylinders by 2D OK model seems consistent with experimental
results, 3D micro structure by OK model and DPD are comparable, 3D simulations have good agreements with
experimental results observed by CD-SEM and STEM. Especially two cylinders connected each other at some point
predicted by 3D simulation is observed actually. These simulation approaches will be important to decide the lithography
mask design, film stack and pre-treatment conditions for more complex multiplication process, for example, the cut mask
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Muramatsu ; T. Nakano ; T. Tomita ; K. Yamamoto ; K. Matsuzaki, et al.
Simulation analysis of directed self-assembly for hole multiplication in guide pattern
", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 904921 (April 16, 2014); doi:10.1117/12.2045865; http://dx.doi.org/10.1117/12.2045865