Emission properties of tin droplets laser-produced-plasma light sources

Hong Chen; Xinbing Wang; Duluo Zuo; Peixiang Lu; Haihong Zhu; Tao Wu

doi:10.1117/12.2045732

17 April 2014 Emission properties of tin droplets laser-produced-plasma light sources

Hong Chen, Xinbing Wang, Duluo Zuo, Peixiang Lu, Haihong Zhu, Tao Wu

Proceedings Volume 9048, Extreme Ultraviolet (EUV) Lithography V; 90481V (2014) https://doi.org/10.1117/12.2045732
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Laser produced plasma (LPP) light sources for extreme ultraviolet (EUV) lithography currently has been extensively studied. Most of the studies are based on CO₂ laser induced plasma from mass limited tin targets. In this work, a droplet dispenser that produces uniform droplets size of about 150μm was established. A pulsed TEA-CO₂ laser and a Nd: YAG laser irradiated the droplets producing plasma respectively to get EUV emission. An X-ray Spectrometer and EUV photodiodes were used to collect the spectra and EUV radiation. The different EUV spectral composition and angular distribution of EUV emission from plasmas induced by the CO₂ and Nd: YAG laser were studied.

Citation Download Citation

Hong Chen, Xinbing Wang, Duluo Zuo, Peixiang Lu, Haihong Zhu, and Tao Wu "Emission properties of tin droplets laser-produced-plasma light sources", Proc. SPIE 9048, Extreme Ultraviolet (EUV) Lithography V, 90481V (17 April 2014); https://doi.org/10.1117/12.2045732

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