Optimization of the spectral performance of multilayer coatings on complex optics in plasma assisted deposition processes

D. Isfort; Diana A. Tonova; M. Sundermann; Thomas Koch

doi:10.1117/12.2054625

1 May 2014 Optimization of the spectral performance of multilayer coatings on complex optics in plasma assisted deposition processes

D. Isfort, Diana A. Tonova, M. Sundermann, Thomas Koch

Author Affiliations +

Proceedings Volume 9131, Optical Modelling and Design III; 913109 (2014) https://doi.org/10.1117/12.2054625
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

The performance of optical components is usually improved by optical coatings. Some of these optical components exhibit complex geometrical shapes and are therefore very difficult to coat in a homogeneous way. The spectral performance of the optical coatings on such substrates will vary as a function of its geometry making it very difficult to keep the spectral performance within customer specifications all over the substrate. Examples for optics with complex geometries are half sphere lenses, freeform surfaces, diffraction gratings, microlense arrays, large substrates etc. We developed a simulation tool that can calculate and optimize the spectral performance of a given multilayer stack on arbitrarily shaped optics as a function of the processing parameters of the coating plant. This tool will obviously reduce the risk and the development costs. The spectral performance of a multilayer stack is given in general by the coating design, that means by the individual layer thicknesses and the refractive indices of the different layer materials. On curved optics different coating materials exhibit different thickness and refractive index distributions. Consequently the optical layer stack will exhibit varying spectral performance at different positions on the substrate. Empirical models for thickness and refractive index distributions have been developed as a function of the most important processing parameters (e.g., deposition rate, deposition angle, ion impingement rate and temperature).

Citation Download Citation

D. Isfort, Diana A. Tonova, M. Sundermann, and Thomas Koch "Optimization of the spectral performance of multilayer coatings on complex optics in plasma assisted deposition processes", Proc. SPIE 9131, Optical Modelling and Design III, 913109 (1 May 2014); https://doi.org/10.1117/12.2054625

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available