Development of a measurement system for the online inspection of microstructured surfaces in harsh industrial conditions

Thomas Mueller; Benjamin Langmann; Eduard Reithmeier

doi:10.1117/12.2052080

15 May 2014 Development of a measurement system for the online inspection of microstructured surfaces in harsh industrial conditions

Thomas Mueller, Benjamin Langmann, Eduard Reithmeier

Author Affiliations +

Proceedings Volume 9141, Optical Sensing and Detection III; 91411F (2014) https://doi.org/10.1117/12.2052080
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

Microscopic imaging techniques are usually applied for the inspection of microstructured surfaces. These techniques require clean measurement conditions. Soilings, e.g. dust or splashing liquids, can disturb the measurement process or even damage instruments. Since these soilings occur in the majority of manufacturing processes, microscopic inspection usually must be carried out in a separate laboratory. We present a measurement system which allows for a microscopic inspection and a 3D reconstruction of microstructured surfaces in harsh industrial conditions. The measurement system also enables precise positioning, e.g. of a grinding wheel, with an accuracy of 5 μm. The main component of the measurement system is a CCD camera with a high-magnification telecentric lens. By means of this camera it is even possible to measure structures with dimensions in the range of 30 to 50 μm. The camera and the lens are integrated into a waterproof and dustproof enclosure. The inspection window of the enclosure has an air curtain which serves as a splash guard. The workpiece illumination is crucial in order to obtain good measurement results. The measuring system includes high-power LEDs which are integrated in a waterproof enclosure. The measurement system also includes a laser with a specially designed lens system to form an extremely narrow light section on the workpiece surface. It is possible to obtain a line width of 25 μm. This line and the camera with the high-magnification telecentric lens are used to perform a laser triangulation of the microstructured surface. This paper describes the system as well as the development and evaluation of the software for the automatic positioning of the workpiece and the automatic three-dimensional surface analysis.

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Thomas Mueller, Benjamin Langmann, and Eduard Reithmeier "Development of a measurement system for the online inspection of microstructured surfaces in harsh industrial conditions", Proc. SPIE 9141, Optical Sensing and Detection III, 91411F (15 May 2014); https://doi.org/10.1117/12.2052080

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