Metal oxide gas sensors on the nanoscale

A. Plecenik; A. A. Haidry; T. Plecenik; P. Durina; M. Truchly; M. Mosko; B. Grancic; M. Gregor; T. Roch; L. Satrapinskyy; A. Moskova; M. Mikula; P. Kus

doi:10.1117/12.2050349

4 June 2014 Metal oxide gas sensors on the nanoscale

A. Plecenik, A. A. Haidry, T. Plecenik, P. Durina, M. Truchly, M. Mosko, B. Grancic, M. Gregor, T. Roch, L. Satrapinskyy, A. Moskova, M. Mikula, P. Kus

Author Affiliations +

Proceedings Volume 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI; 90830Y (2014) https://doi.org/10.1117/12.2050349
Event: SPIE Defense + Security, 2014, Baltimore, MD, United States

Abstract

Low cost, low power and highly sensitive gas sensors operating at room temperature are very important devices for controlled hydrogen gas production and storage. One of the disadvantages of chemosensors is their high operating temperature (usually 200 – 400 °C), which excludes such type of sensors from usage in explosive environment. In this report, a new concept of gas chemosensors operating at room temperature based on TiO₂ thin films is discussed. Integration of such sensor is fully compatible with sub-100 nm semiconductor technology and could be transferred directly from labor to commercial sphere.

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A. Plecenik, A. A. Haidry, T. Plecenik, P. Durina, M. Truchly, M. Mosko, B. Grancic, M. Gregor, T. Roch, L. Satrapinskyy, A. Moskova, M. Mikula, and P. Kus "Metal oxide gas sensors on the nanoscale", Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90830Y (4 June 2014); https://doi.org/10.1117/12.2050349

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