Implementing MEMS technology for soft, (bio)electronics interfaces

Alessia Romeo; Yannick Hofmeister; Stéphanie P. Lacour

doi:10.1117/12.2051173

4 June 2014 Implementing MEMS technology for soft, (bio)electronics interfaces

Alessia Romeo, Yannick Hofmeister, Stéphanie P. Lacour

Proceedings Volume 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI; 90831F (2014) https://doi.org/10.1117/12.2051173
Event: SPIE Defense + Security, 2014, Baltimore, MD, United States

Abstract

Soft, bioelectronics interfaces are broadly defined as microfabricated devices with mechanical properties suited to comply with biological tissues. There are many challenges associated with the development of such technology platforms. Simultaneously one must achieve reliable electronic performance, thermal and environmental stability, mechanical compliance, and biocompatibility. Materials and system architecture must be designed such that mechanical integrity and electrical functionality is preserved during fabrication, implementation and use of the interface. Depositing and patterning conventional device materials, ranging from inorganic to organic thin films as well as nanomaterials, directly onto soft elastomeric substrates enable electronic devices with enhanced mechanical flexibility. Success in fabrication also relies on a careful design of the mechanical architecture of the soft interface to minimize mechanical stresses in the most fragile materials.

Citation Download Citation

Alessia Romeo, Yannick Hofmeister, and Stéphanie P. Lacour "Implementing MEMS technology for soft, (bio)electronics interfaces", Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90831F (4 June 2014); https://doi.org/10.1117/12.2051173

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