Portable low-coherence interferometry for quantitatively imaging fast dynamics with extended field of view

Natan T. Shaked; Pinhas Girshovitz; Irena Frenklach

doi:10.1117/12.2051285

5 June 2014 Portable low-coherence interferometry for quantitatively imaging fast dynamics with extended field of view

Natan T. Shaked, Pinhas Girshovitz, Irena Frenklach

Proceedings Volume 9117, Three-Dimensional Imaging, Visualization, and Display 2014; 911709 (2014) https://doi.org/10.1117/12.2051285
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

We present our recent advances in the development of compact, highly portable and inexpensive wide-field interferometric modules. By a smart design of the interferometric system, including the usage of low-coherence illumination sources and common-path off-axis geometry of the interferometers, spatial and temporal noise levels of the resulting quantitative thickness profile can be sub-nanometric, while processing the phase profile in real time. In addition, due to novel experimentally-implemented multiplexing methods, we can capture low-coherence off-axis interferograms with significantly extended field of view and in faster acquisition rates. Using these techniques, we quantitatively imaged rapid dynamics of live biological cells including sperm cells and unicellular microorganisms. Then, we demonstrated dynamic profiling during lithography processes of microscopic elements, with thicknesses that may vary from several nanometers to hundreds of microns. Finally, we present new algorithms for fast reconstruction (including digital phase unwrapping) of off-axis interferograms, which allow real-time processing in more than video rate on regular single-core computers.

Citation Download Citation

Natan T. Shaked, Pinhas Girshovitz, and Irena Frenklach "Portable low-coherence interferometry for quantitatively imaging fast dynamics with extended field of view", Proc. SPIE 9117, Three-Dimensional Imaging, Visualization, and Display 2014, 911709 (5 June 2014); https://doi.org/10.1117/12.2051285

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available