Paper
14 August 2006 Nanometric displacement measurement using phase singularities in Laguerre-Gauss transform of speckle pattern
Wei Wang, Tomoaki Yokozeki, Reika Ishijima, Steen G. Hanson, Mitsuo Takeda
Author Affiliations +
Abstract
Contrary to the common belief of optical metrology, where the phase singularities are considered as obstacles in phase unwrapping, we propose a new technique that makes use of phase singularities in the complex signal representation of a speckle pattern as indicators of local speckle displacements. The complex signal representation is generated by Laguerre-Gauss filtering the dynamic speckle patterns. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology for lateral speckle displacement measurement with a large dynamic range.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Wang, Tomoaki Yokozeki, Reika Ishijima, Steen G. Hanson, and Mitsuo Takeda "Nanometric displacement measurement using phase singularities in Laguerre-Gauss transform of speckle pattern", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62920X (14 August 2006); https://doi.org/10.1117/12.681307
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Spiral phase plates

Speckle pattern

Signal analyzers

Speckle

Optical vortices

Metrology

Optical metrology

Back to Top