Paper
24 June 2014 Thermomechancial characterization in a radiant energy imager using null switching
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Abstract
Thermomechanical noise for a MEMs-based infrared detector using null switching (US patent 7977635) depends on vibrational amplitude, since IR radiation is transduced to a change in the duty cycle of a repetitively closing switch. Equipartition theorem gives a maximum rms vibrational amplitude of 45 pm for the fabricated cantilever switch at its natural frequency. This gives a worst case timing uncertainty of 700 ns and an NEP of 2 pW/Sqrt[Hz].
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Javaneh Boroumand , Imen Rezadad, Ammar Alhasan, Evan M. Smith, and Robert E. Peale "Thermomechancial characterization in a radiant energy imager using null switching", Proc. SPIE 9070, Infrared Technology and Applications XL, 907020 (24 June 2014); https://doi.org/10.1117/12.2052338
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Finite element methods

Metals

Microelectromechanical systems

Aluminum

Sensors

Switching

Thermography

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