An optically resonant position read-out system for MEMS gas sensors

Gino Putrino; Adrian Keating; Mariusz Martyniuk; Lorenzo Faraone; John M. Dell

doi:10.1117/12.2053135

25 June 2014 An optically resonant position read-out system for MEMS gas sensors

Gino Putrino, Adrian Keating, Mariusz Martyniuk, Lorenzo Faraone, John M. Dell

Proceedings Volume 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI; 90832X (2014) https://doi.org/10.1117/12.2053135
Event: SPIE Defense + Security, 2014, Baltimore, MD, United States

Abstract

We present an experimental demonstration of a novel, integrated readout approach for measuring the suspended height of micro-electro-mechanical systems (MEMS) structures. The approach is based on creating a resonant optical cavity between the suspended MEMS structure and the substrate that the MEMS structure is anchored to. The resulting interferometric effect causes modulation of an optical laser signal which is strongly dependent on the position of the MEMS device.

Citation Download Citation

Gino Putrino, Adrian Keating, Mariusz Martyniuk, Lorenzo Faraone, and John M. Dell "An optically resonant position read-out system for MEMS gas sensors", Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90832X (25 June 2014); https://doi.org/10.1117/12.2053135

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