Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer

Yangjin Kim; Kenichi Hibino; Naohiko Sugita; Mamoru Mitsuishi

doi:10.1117/12.2061476

18 August 2014 Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9203, Interferometry XVII: Techniques and Analysis; 92030Q (2014) https://doi.org/10.1117/12.2061476
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

For the surface shape measurement of a semiconductor with a highly reflective index, it is important to effectively suppress the harmonic signals from multiple reflections. In application, the phase extraction algorithm should have a maximum value when there is no phase-shift miscalibration. In this presentation, a new 4N - 3 phase extraction algorithm, which has the ability to suppress harmonic signals and exhibits a fringe contrast maximum value when there is no phaseshift error, was derived. This new 4N - 3 algorithm consists of a new polynomial window function and a discrete Fourier transform term and has the ability to compensate for 2^nd-order nonlinearity in the phase shift. The suppression ability of the new polynomial window function is compared with other conventional window functions. The sampling functions of the new 4N - 3 algorithm have much smaller amplitudes in the vicinity of the detection frequency than does synchronous detection or other phase extraction algorithms with conventional window functions.

Citation Download Citation

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi "Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030Q (18 August 2014); https://doi.org/10.1117/12.2061476

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