Paper
23 July 2014 Soft x-ray quantum efficiency of silicon hybrid CMOS detectors
Author Affiliations +
Abstract
Si Hybrid CMOS detectors (HCDs) are sensitive to X-rays between approximately 0.2 – 20 keV. HCDs can provide superior performance to traditional CCDs in multiple areas: faster read out time, windowed read out mode, less susceptible to radiation & micrometeoroid damage, and lower power consumption. X-ray detectors designed for use in astronomical observatories must have an optical blocking filter to prevent the detectors from being saturated by optical light. We have previously reported on the successful deposition of an Al optical blocking layer directly onto the surface of HCDs. These blocking filters were deposited with multiple thicknesses from 180 – 1000 Å and successfully block optical light at all thicknesses, with minimal impact expected on quantum efficiency at the energies of interest for these detectors. The thin Al layer is not expected to impact quantum efficiency at the energies of interest for these detectors. We report energy dependent soft X-ray quantum efficiency measurements for multiple HCDs with different optical blocking filter thicknesses.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zachary R. Prieskorn, Stephen D Bongiorno, David N. Burrows, Abraham D. Falcone, Christopher V. Griffith, and Jonathan Nikoleyczik "Soft x-ray quantum efficiency of silicon hybrid CMOS detectors", Proc. SPIE 9154, High Energy, Optical, and Infrared Detectors for Astronomy VI, 915410 (23 July 2014); https://doi.org/10.1117/12.2056566
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Cited by 4 scholarly publications.
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KEYWORDS
Sensors

Quantum efficiency

Silicon

X-rays

Aluminum

X-ray detectors

Optical filters

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