Combined fabrication process for high-precision aspheric surface based on smoothing polishing and magnetorheological finishing

Xuqing Nie; Shengyi Li; Ci Song; Hao Hu

doi:10.1117/12.2067911

6 August 2014 Combined fabrication process for high-precision aspheric surface based on smoothing polishing and magnetorheological finishing

Xuqing Nie, Shengyi Li, Ci Song, Hao Hu

Author Affiliations +

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 928111 (2014) https://doi.org/10.1117/12.2067911
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Due to the different curvature everywhere, the aspheric surface is hard to achieve high-precision accuracy by the traditional polishing process. Controlling of the mid-spatial frequency errors (MSFR), in particular, is almost unapproachable. In this paper, the combined fabrication process based on the smoothing polishing (SP) and magnetorheological finishing (MRF) is proposed. The pressure distribution of the rigid polishing lap and semi-flexible polishing lap is calculated. The shape preserving capacity and smoothing effect are compared. The feasibility of smoothing aspheric surface with the semi-flexible polishing lap is verified, and the key technologies in the SP process are discussed. Then, A K4 parabolic surface with the diameter of 500mm is fabricated based on the combined fabrication process. A Φ150 mm semi-flexible lap is used in the SP process to control the MSFR, and the deterministic MRF process is applied to figure the surface error. The root mean square (RMS) error of the aspheric surface converges from 0.083λ (λ=632.8 nm) to 0.008λ. The power spectral density (PSD) result shows that the MSFR are well restrained while the surface error has a great convergence.

Citation Download Citation

Xuqing Nie, Shengyi Li, Ci Song, and Hao Hu "Combined fabrication process for high-precision aspheric surface based on smoothing polishing and magnetorheological finishing", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 928111 (6 August 2014); https://doi.org/10.1117/12.2067911

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