Simple and precise measurement of the complex refractive index and thickness for thin films

Yu Peng; Wei Li

doi:10.1117/12.2067095

21 August 2014 Simple and precise measurement of the complex refractive index and thickness for thin films

Yu Peng, Wei Li

Proceedings Volume 9233, International Symposium on Photonics and Optoelectronics 2014; 923310 (2014) https://doi.org/10.1117/12.2067095
Event: International Symposium on Photonics and Optoelectronics (SOPO 2014), 2014, Suzhou, China

Abstract

We demonstrate applications of a novel scheme which is used for measuring refractive index and thickness of thin film by analyzing the relative phase difference and reflected ratio at reflection point of a monolithic folded Fabry-Perot cavity (MFC). The complex refractive index and the thickness are calculated according to the Fresnel formula. Results show that the proposed method has an improvement in accuracy with simple and clear operating process compared with the conventional Ellipsometry.

Citation Download Citation

Yu Peng and Wei Li "Simple and precise measurement of the complex refractive index and thickness for thin films", Proc. SPIE 9233, International Symposium on Photonics and Optoelectronics 2014, 923310 (21 August 2014); https://doi.org/10.1117/12.2067095

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