Progress towards a MEMS tunable infrared filter using porous silicon

Dmitry A. Kozak; Todd Stievater; Marcel Pruessner; William Rabinovich

doi:10.1117/12.2060925

28 August 2014 Progress towards a MEMS tunable infrared filter using porous silicon

Dmitry A. Kozak, Todd Stievater, Marcel Pruessner, William Rabinovich

Proceedings Volume 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI; 91700C (2014) https://doi.org/10.1117/12.2060925
Event: SPIE NanoScience + Engineering, 2014, San Diego, California, United States

Abstract

The unique optical properties of porous silicon show it to be a promising material for imaging and spectroscopy in the mid-infrared and long-infrared wavelength ranges. A tunable MEMS filter using porous silicon as a high-reflectivity layer is proposed. Measurements on fabricated porous silicon-based distributed Bragg reflectors and Fabry-Perot etalons are presented.

Citation Download Citation

Dmitry A. Kozak, Todd Stievater, Marcel Pruessner, and William Rabinovich "Progress towards a MEMS tunable infrared filter using porous silicon", Proc. SPIE 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91700C (28 August 2014); https://doi.org/10.1117/12.2060925

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