Laser damage properties of films with different surface accuracy of substrates

Jinman Ge; Junhong Su

doi:10.1117/12.2067739

18 September 2014 Laser damage properties of films with different surface accuracy of substrates

Jinman Ge, Junhong Su

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92821K (2014) https://doi.org/10.1117/12.2067739
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

The analysis of laser damage properties of films is the focus of most concern in recent years. Many properties of the film have been studied, but the surface accuracy of the substrates shouldn’t be ignored. TiO₂ films are prepared on K9 glass substrates with different surface accuracy by ion beam assistant deposition technique. The films’ surface morphology, microstructure and thickness are been analyzed. It shows that the substrates with different surface accuracy have some impact on thin film growth and make different micro-structures of thin film. According to the international standard requirements of the damage threshold, the films’ damage threshold is measured on the films’ laser-induced damage threshold test platform composed with 1064 nm Nd: YAG laser. The results indicate that the laser damage threshold of the film deposited on the substrate with the better surface accuracy is higher, and the substrate with high accuracy can improve the laser damage resistance of the film.

Citation Download Citation

Jinman Ge and Junhong Su "Laser damage properties of films with different surface accuracy of substrates", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92821K (18 September 2014); https://doi.org/10.1117/12.2067739

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KEYWORDS

Laser induced damage

Laser damage threshold

Titanium dioxide

Particles

Resistance

Interferometers

Laser systems engineering

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