Paper
25 September 2014 Chromatic error correction of diffractive optical elements at minimum etch depths
Jochen Barth, Tobias Gühne
Author Affiliations +
Abstract
The integration of diffractive optical elements (DOE) into an optical design opens up new possibilities for applications in sensing and illumination. If the resulting optics is used in a larger spectral range we must correct not only the chromatic error of the conventional, refractive, part of the design but also of the DOE. We present a simple but effective strategy to select substrates which allow the minimum etch depths for the DOEs. The selection depends on both the refractive index and the dispersion.
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Jochen Barth and Tobias Gühne "Chromatic error correction of diffractive optical elements at minimum etch depths", Proc. SPIE 9192, Current Developments in Lens Design and Optical Engineering XV, 91920J (25 September 2014); https://doi.org/10.1117/12.2061000
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KEYWORDS
Diffractive optical elements

Etching

Colorimetry

Refractive index

Glasses

Silicon

Lens design

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