Replicating micro-optical structures using soft embossing technique

Xiaobing Shang; Jin-Yi Tan; Jelle De Smet; Pankaj Joshi; Esma Islamaj; Dieter Cuypers; Michael Vervaeke; Jürgen Van Erps; Hugo Thienpont; Herbert De Smet

doi:10.1117/12.2065912

17 October 2014 Replicating micro-optical structures using soft embossing technique

Xiaobing Shang, Jin-Yi Tan, Jelle De Smet, Pankaj Joshi, Esma Islamaj, Dieter Cuypers, Michael Vervaeke, Jürgen Van Erps, Hugo Thienpont, Herbert De Smet

Author Affiliations +

Proceedings Volume 9231, 30th European Mask and Lithography Conference; 92310H (2014) https://doi.org/10.1117/12.2065912
Event: 30th European Mask and Lithography Conference, 2014, Dresden, Germany

Abstract

In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.

Citation Download Citation

Xiaobing Shang, Jin-Yi Tan, Jelle De Smet, Pankaj Joshi, Esma Islamaj, Dieter Cuypers, Michael Vervaeke, Jürgen Van Erps, Hugo Thienpont, and Herbert De Smet "Replicating micro-optical structures using soft embossing technique", Proc. SPIE 9231, 30th European Mask and Lithography Conference, 92310H (17 October 2014); https://doi.org/10.1117/12.2065912

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