Design, simulation and test of silicon immersed gratings: key to compact spectrometers in the short-wave infrared

Aaldert H. van Amerongen; Paul J. J. Tol; Tonny H. M. Coppens; Ruud Schuurhof; Phillip P. Laubert; Jos Ruijter; Ruud W. M. Hoogeveen

doi:10.1117/12.2067203

21 October 2014 Design, simulation and test of silicon immersed gratings: key to compact spectrometers in the short-wave infrared

Aaldert H. van Amerongen, Paul J. J. Tol, Tonny H. M. Coppens, Ruud Schuurhof, Phillip P. Laubert, Jos Ruijter, Ruud W. M. Hoogeveen

Author Affiliations +

Proceedings Volume 9241, Sensors, Systems, and Next-Generation Satellites XVIII; 92411H (2014) https://doi.org/10.1117/12.2067203
Event: SPIE Remote Sensing, 2014, Amsterdam, Netherlands

Abstract

We present results of our integrated approach to the development of novel diffraction gratings. At SRON we manufacture prism-shaped silicon immersed gratings. Diffraction takes place inside the high-refractive index medium, boosting the resolving power and the angular dispersion. This enables highly compact spectrometer designs. We are continuously improving the cycle of design, simulation and test to create custom gratings for space and ground-based spectroscopic applications in the short-wave infrared wavelength range. Applications are space-based monitoring of greenhouse and pollution gases in the Earth atmosphere and ground-based SWIR spectroscopy for, a.o., characterization of exo-planet atmospheres [1]. We make gratings by etching V-shaped grooves in mono-crystalline silicon. The groove facets are aligned with the crystal lattice yielding a smooth and highly deterministic groove shape. This enables us to predict the polarized efficiency performance accurately by simulation. Feeding back manufacturing tolerances from our production process, we can also determine reliable error bars for the predicted performance. Combining the simulated values for polarized efficiency with ray-tracing, we can optimize the shape of the grating prism to eliminate unwanted internal reflections. In this contribution we present the architecture of our design and simulation platform as well as a description of test setups and typical results.

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Aaldert H. van Amerongen, Paul J. J. Tol, Tonny H. M. Coppens, Ruud Schuurhof, Phillip P. Laubert, Jos Ruijter, and Ruud W. M. Hoogeveen "Design, simulation and test of silicon immersed gratings: key to compact spectrometers in the short-wave infrared", Proc. SPIE 9241, Sensors, Systems, and Next-Generation Satellites XVIII, 92411H (21 October 2014); https://doi.org/10.1117/12.2067203

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