Paper
31 October 2014 Research on laser damage of final optics assembly on high-power laser facility
Author Affiliations +
Abstract
In order to improve laser damage resistance of the Final Optics Assembly (FOA), simulation analysis have been done for 1ω, 2ω and 3ω laser beam considering ghost images to the 4th order. The panels of ground glass scatter ghost laser around the FOA walls and the panels of architectural glass absorb the 1th order energy. The appearance of smoothing fused silica surface defect and the effect of wiping off etching contamination are researched on HF-based etching processes under ultrasonic. Now, 18 shots were executed using 310x310mm laser with 3ns pulse width. During the experiment, the third harmonic laser terminal output energy is 1500J~3500J, and the maximum laser energy flux is about 4J/cm2. This presentation addresses the optical configuration of the FOA, the simulation analysis of ghost, the way of ground glasses absorbing energy and the result of laser damage resistance of fused silica on HF-based etching processes under ultrasonic.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dongfeng Zhao, Rong Wu II, Zunqi Lin III, Jianqiang Zhu IV, and Li Wang "Research on laser damage of final optics assembly on high-power laser facility", Proc. SPIE 9237, Laser-Induced Damage in Optical Materials: 2014, 92371V (31 October 2014); https://doi.org/10.1117/12.2066260
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Etching

Silica

Ultrasonics

Glasses

Laser induced damage

HF etching

Particles

Back to Top