Precision issues in angle measurements by means of autocollimator

Yuri V. Filatov; Roman A Larichev

doi:10.1117/12.2075598

13 November 2014 Precision issues in angle measurements by means of autocollimator

Yuri V. Filatov, Roman A Larichev

Proceedings Volume 9276, Optical Metrology and Inspection for Industrial Applications III; 927626 (2014) https://doi.org/10.1117/12.2075598
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Ambiguity in plane angle definition is considered. Autocollimator performance is regarded from geometric ray optics and wave diffraction optics points of view. Few typical aberrations and their influence on image formation in autocollimator are presented. Modeling estimates of aberration influence on angle measurements are outlined.

Citation Download Citation

Yuri V. Filatov and Roman A Larichev "Precision issues in angle measurements by means of autocollimator", Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927626 (13 November 2014); https://doi.org/10.1117/12.2075598

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