A review: mid-infrared photonic crystals in silicon and porous silicon based on ion beam irradiation

Zhiya Dang; Mark Breese; Dongqing Liu; Shuvan Prashant Turaga; Sara Azimi; Jiao Song; Agnieszka Banas; Gonzalo Recio-Sánchez

doi:10.1117/12.2072443

13 November 2014 A review: mid-infrared photonic crystals in silicon and porous silicon based on ion beam irradiation

Zhiya Dang, Mark Breese, Dongqing Liu, Shuvan Prashant Turaga, Sara Azimi, Jiao Song, Agnieszka Banas, Gonzalo Recio-Sánchez

Author Affiliations +

Proceedings Volume 9277, Nanophotonics and Micro/Nano Optics II; 92771Q (2014) https://doi.org/10.1117/12.2072443
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Silicon and porous silicon based photonic crystals are key aspects of photonic circuits with good compatibility with integrated circuits. Here a brief review is carried out on the fabrication of mid infrared photonic crystals using experimental processes of combining ion beam irradiation and electrochemical anodisation of silicon. Experimental processes have been developed to fabricate high aspect ratio trenches in porous silicon, high aspect ratio silicon pillars, buried channels in porous silicon, and multilevel freestanding silicon wires. These structures have the potential to be used for photonic crystals. Several 2D, quasi-3D and 3D mid infrared photonic crystals in porous silicon and silicon have been designed and fabricated.

Citation Download Citation

Zhiya Dang, Mark Breese, Dongqing Liu, Shuvan Prashant Turaga, Sara Azimi, Jiao Song, Agnieszka Banas, and Gonzalo Recio-Sánchez "A review: mid-infrared photonic crystals in silicon and porous silicon based on ion beam irradiation", Proc. SPIE 9277, Nanophotonics and Micro/Nano Optics II, 92771Q (13 November 2014); https://doi.org/10.1117/12.2072443

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Silicon

Ions

Photonic crystals

Scanning electron microscopy

Semiconducting wafers

Ion beams

Neodymium

Show All Keywords

Keywords/Phrases

Search In:

Publication Years