Mid-ultraviolet pulsed laser micromachining of SiC

Litao Qi; Mingxing Li; Haipeng Lin; Jinping Hu; Qingju Tang; Chunsheng Liu

doi:10.1117/12.2073590

18 November 2014 Mid-ultraviolet pulsed laser micromachining of SiC

Litao Qi, Mingxing Li, Haipeng Lin, Jinping Hu, Qingju Tang, Chunsheng Liu

Proceedings Volume 9266, High-Power Lasers and Applications VII; 92660V (2014) https://doi.org/10.1117/12.2073590
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

This paper provides an investigation of the ablation behavior of single crystal 4H-SiC and 6H-SiC wafer to improve the manufacturability and high-temperature performance of SiC using laser applications. 266nm pulsed laser micromachining of SiC was investigated. The purpose is to establish suitable laser parametric regime for the fabrication of high accuracy, high spatial resolution and thin diaphragms for high-temperature MEMS pressure sensor applications. Etch rate, ablation threshold and quality of micromachined features were evaluated. The governing ablation mechanisms, such as thermal vaporization, phase explosion, and photomechanical fragmentation, were correlated with the effects of pulse energy. The ablation threshold is obtained with ultraviolet pulsed laser ablation. The results suggested ultraviolet pulsed laser’s potential for rapid manufacturing. Excellent quality of machined features with little collateral thermal damage was obtained in the lower pulse energy range. The leading material removal mechanisms under these conditions were discussed.

Citation Download Citation

Litao Qi, Mingxing Li, Haipeng Lin, Jinping Hu, Qingju Tang, and Chunsheng Liu "Mid-ultraviolet pulsed laser micromachining of SiC", Proc. SPIE 9266, High-Power Lasers and Applications VII, 92660V (18 November 2014); https://doi.org/10.1117/12.2073590

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available