Tolerance analysis of a super-resolution optical system

Weiyi Zha; Jun Chang; Weilin Chen; Haibo Yang; Xiusheng Yan

doi:10.1117/12.2072679

18 November 2014 Tolerance analysis of a super-resolution optical system

Weiyi Zha, Jun Chang, Weilin Chen, Haibo Yang, Xiusheng Yan

Proceedings Volume 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics; 92981V (2014) https://doi.org/10.1117/12.2072679
Event: International Symposium on Optoelectronic Technology and Application 2014, 2014, Beijing, China

Abstract

Pupil filtering is a widely used super-resolving technique. This technique utilizes one or more diffractive superresolution elements (DSEs) to break the diffraction limit. This paper focused on the tolerance analysis of DSEs. Although the analysis in this paper was based on a specific super-resolution system, it was sufficient to demonstrate our efforts and make some conclusions. Generally, two types of tolerances have been taken into consideration. One is DSE's position tolerance. The other is the tolerance of DSE's phase transmittance. With the presented method, it is able to evaluate the influence of DSE tolerances on a super-resolution optical system, and thus to guide practical fabrication.

Citation Download Citation

Weiyi Zha, Jun Chang, Weilin Chen, Haibo Yang, and Xiusheng Yan "Tolerance analysis of a super-resolution optical system", Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92981V (18 November 2014); https://doi.org/10.1117/12.2072679

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