Analyses of multiple surfaces transform interferometry in parallel plate measurement

Lin Zhang; Huan Ren; Yi Yang; Yong Liu; Zhendong Shi; Quan Yuan; Hongzhen Jiang

doi:10.1117/12.2071877

3 December 2014 Analyses of multiple surfaces transform interferometry in parallel plate measurement

Lin Zhang, Huan Ren, Yi Yang, Yong Liu, Zhendong Shi, Quan Yuan, Hongzhen Jiang

Proceedings Volume 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors; 92970Y (2014) https://doi.org/10.1117/12.2071877
Event: International Symposium on Optoelectronic Technology and Application 2014, 2014, Beijing, China

Abstract

Multiple surfaces transform interferometery is a preferred technology for surface profile and index homogeneity measurement using a Fourier based analysis method combined with phase-shifting interferometer. As a four-surface cavity for example, the surface form and index inhomogeneity of the parallel plate are deduced by extracting the information from the corresponding interference frequency. The errors of surface form and index homogeneity are simultaneously simulated and analyzed with different sampling buckets. The results show the feasibility and high precision of this approach compared with traditional methods.

Citation Download Citation

Lin Zhang, Huan Ren, Yi Yang, Yong Liu, Zhendong Shi, Quan Yuan, and Hongzhen Jiang "Analyses of multiple surfaces transform interferometry in parallel plate measurement", Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 92970Y (3 December 2014); https://doi.org/10.1117/12.2071877

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