Development of driving setup for micromechanical friction vacuum gauge

Anton N. Boyko; Andrei S. Shalimov; Sergei P. Timoshenkov; Pavel B. Kovyrkin

doi:10.1117/12.2180876

18 December 2014 Development of driving setup for micromechanical friction vacuum gauge

Anton N. Boyko, Andrei S. Shalimov, Sergei P. Timoshenkov, Pavel B. Kovyrkin

Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 94400U (2014) https://doi.org/10.1117/12.2180876
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation

Abstract

The results of development of driving setup for micromechanical friction vacuum gauge are presented. For driving of the micromechanical transducer the saw-tooth signal was used because of its good repeatability and possibility of automatic operation. Specialized switching card for resonator driving and output signal processing was developed and implemented. Experimental setup consists of PC, electric switching card and oscilloscope was used to explore damped and overdamped oscillations. The study exhibits stable repeatability of driving procedure. Resonator eigenfrequency agrees with calculated value and confirms that oscillations correspond to the main mode. The results can be applied for creation of micromechanical friction vacuum gauges.

Citation Download Citation

Anton N. Boyko, Andrei S. Shalimov, Sergei P. Timoshenkov, and Pavel B. Kovyrkin "Development of driving setup for micromechanical friction vacuum gauge", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400U (18 December 2014); https://doi.org/10.1117/12.2180876

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