Super-polishing of Zerodur aspheres by means of conventional polishing technology

Jaroslav Polak; Eva Klepetková; Josef Pošmourný; Miroslav Šulc; František Procháska; David Tomka; Ondřej Matoušek; Ivana Poláková; Eduard Šubert

doi:10.1117/12.2175899

7 January 2015 Super-polishing of Zerodur aspheres by means of conventional polishing technology

Jaroslav Polak, Eva Klepetková, Josef Pošmourný, Miroslav Šulc, František Procháska, David Tomka, Ondřej Matoušek, Ivana Poláková, Eduard Šubert

Author Affiliations +

Proceedings Volume 9442, Optics and Measurement Conference 2014; 944212 (2015) https://doi.org/10.1117/12.2175899
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic

Abstract

This paper describes a quest to find simple technique to superpolish Zerodur asphere (55μm departure from best fit sphere) that could be employed on old fashion way 1-excenter optical polishing machine. The work focuses on selection of polishing technology, study of different polishing slurries and optimization of polishing setup. It is demonstrated that either by use of fine colloidal CeO2 slurry or by use of bowl-feed polishing setup with CeO2 charged pitch we could reach 0.4nm RMS roughness while removing <30nm of surface layer. This technique, although not optimized, was successfully used to improve surface roughness on already prepolished Zerodur aspheres without necessity to involve sophisticated super-polishing technology and highly trained manpower.

Citation Download Citation

Jaroslav Polak, Eva Klepetková, Josef Pošmourný, Miroslav Šulc, František Procháska, David Tomka, Ondřej Matoušek, Ivana Poláková, and Eduard Šubert "Super-polishing of Zerodur aspheres by means of conventional polishing technology", Proc. SPIE 9442, Optics and Measurement Conference 2014, 944212 (7 January 2015); https://doi.org/10.1117/12.2175899

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available