Influence of shearing displacement error study on two dimensional lateral shearing interferometry

Hongjun Wang; Cong Zhang; Ailing Tian; Bingcai Liu

doi:10.1117/12.2083156

19 February 2015 Influence of shearing displacement error study on two dimensional lateral shearing interferometry

Hongjun Wang, Cong Zhang, Ailing Tian, Bingcai Liu

Proceedings Volume 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014); 94493C (2015) https://doi.org/10.1117/12.2083156
Event: The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014), 2014, Xi'an, China

Abstract

Lateral shearing interference detection is a economically efficient method which is used to the online testing process of aspheric surface. Whereas, when shear plate is used in lateral shearing interference to detect large aperture aspherical surface, the real moving shear plate can produce shearing error, which brings error into the two-dimensional wavefront reconstruction of aspheric surface. So, for shearing error, Zernike polynomial fitting method is used to study shearing displacement error on the influence of two-dimensional wavefront information reconstruction by computer simulation. For the same measured non-spherical surface, different shearing displacement error influences on the precision of wavefront reconstruction are compared by computer simulation，and finally build the corresponding relations between wave information integrity and shearing displacement error

Citation Download Citation

Hongjun Wang, Cong Zhang, Ailing Tian, and Bingcai Liu "Influence of shearing displacement error study on two dimensional lateral shearing interferometry", Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493C (19 February 2015); https://doi.org/10.1117/12.2083156

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