Electron-beam recording of patterns in chalcogenide films

S. A. Sergeev; M. S. Iovu; O. V. Iaseniuc

doi:10.1117/12.2069974

20 February 2015 Electron-beam recording of patterns in chalcogenide films

S. A. Sergeev, M. S. Iovu, O. V. Iaseniuc

Proceedings Volume 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII; 92580S (2015) https://doi.org/10.1117/12.2069974
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies 2014, 2014, Constanta, Romania

Abstract

Thin films of chalcogenide glasses (ChG) of different composition have been used for e-beam recording of diffraction grating structures. The dependencies of diffraction efficiency of gratings on radiation dose were studied. The influence of ChG film composition on diffraction properties of gratings was shown. It was established that the refractive index gratings formed in As₂S₃ films exhibit high stability during their dark storage. The diffraction efficiency enhancement caused by uniform light irradiation was observed for gratings recorded in As₄S₃Se₃ thin films, doped with Sn. With use of computer-controlled positioning of electron beam both the raster scan and vector patterns were recorded in As₂S₃ films. In the former case the images from BMP-files were patterned. In the latter case the mosaic of diffraction gratings, producing the multi-beam light diffraction was recorded.

Citation Download Citation

S. A. Sergeev, M. S. Iovu, and O. V. Iaseniuc "Electron-beam recording of patterns in chalcogenide films", Proc. SPIE 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 92580S (20 February 2015); https://doi.org/10.1117/12.2069974

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