Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides

Timo Aalto; Mikko Harjanne; Sami Ylinen; Markku Kapulainen; Tapani Vehmas; Matteo Cherchi

doi:10.1117/12.2079748

27 February 2015 Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides

Timo Aalto, Mikko Harjanne, Sami Ylinen, Markku Kapulainen, Tapani Vehmas, Matteo Cherchi

Proceedings Volume 9367, Silicon Photonics X; 93670B (2015) https://doi.org/10.1117/12.2079748
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 μm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.

Citation Download Citation

Timo Aalto, Mikko Harjanne, Sami Ylinen, Markku Kapulainen, Tapani Vehmas, and Matteo Cherchi "Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides", Proc. SPIE 9367, Silicon Photonics X, 93670B (27 February 2015); https://doi.org/10.1117/12.2079748

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available