High-quality slot waveguide ring resonator based on atomic layer deposition

A. Autere; L. Karvonen; A. Säynätjoki; M. Roussey; E. Färm; M. Kemell; X. Tu; T. Y. Liow; G. Q. Lo; M. Ritala; M. Leskelä; S. Honkanen; Z. Sun

doi:10.1117/12.2076903

27 February 2015 High-quality slot waveguide ring resonator based on atomic layer deposition

A. Autere, L. Karvonen, A. Säynätjoki, M. Roussey, E. Färm, M. Kemell, X. Tu, T. Y. Liow, G. Q. Lo, M. Ritala, M. Leskelä, S. Honkanen, Z. Sun

Author Affiliations +

Proceedings Volume 9367, Silicon Photonics X; 93671J (2015) https://doi.org/10.1117/12.2076903
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Slot waveguide based ring resonators filled with atomic layer deposited (ALD) aluminum oxide (Al₂O₃) were fabricated and characterized. Our results demonstrate that ALD can be used to create slot waveguide ring resonators with relatively high Q-factors, which opens new possibilities for various photonic applications, such as optical sensing and all-optical signal processing.

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A. Autere, L. Karvonen, A. Säynätjoki, M. Roussey, E. Färm, M. Kemell, X. Tu, T. Y. Liow, G. Q. Lo, M. Ritala, M. Leskelä, S. Honkanen, and Z. Sun "High-quality slot waveguide ring resonator based on atomic layer deposition", Proc. SPIE 9367, Silicon Photonics X, 93671J (27 February 2015); https://doi.org/10.1117/12.2076903

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