Heterogeneously-integrated VCSEL using high-contrast grating on silicon

James Ferrara; Li Zhu; Weijian Yang; Pengfei Qiao; Connie J. Chang-Hasnain

doi:10.1117/12.2079732

27 February 2015 Heterogeneously-integrated VCSEL using high-contrast grating on silicon

James Ferrara, Li Zhu, Weijian Yang, Pengfei Qiao, Connie J. Chang-Hasnain

Proceedings Volume 9372, High Contrast Metastructures IV; 937208 (2015) https://doi.org/10.1117/12.2079732
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

We present a unique heterogeneous integration approach for VCSELs on silicon using eutectic bonding. An electrically pumped III-V – silicon heterogeneous VCSEL is demonstrated using a high-contrast grating (HCG) reflector on silicon. CW output power >1.5 mW, thermal resistance of 1.46 K/mW, and 5 Gb/s direct modulation is demonstrated. We also explore the possibility of an all-HCG VCSEL structure that would benefit from stronger thermal performance, larger tuning efficiency, and higher direct modulation speeds.

Citation Download Citation

James Ferrara, Li Zhu, Weijian Yang, Pengfei Qiao, and Connie J. Chang-Hasnain "Heterogeneously-integrated VCSEL using high-contrast grating on silicon", Proc. SPIE 9372, High Contrast Metastructures IV, 937208 (27 February 2015); https://doi.org/10.1117/12.2079732

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