Parameter-tolerant design of high contrast gratings

Christyves Chevallier; Nicolas Fressengeas; Joël Jacquet; Guilhem Almuneau; Youness Laaroussi; Olivier Gauthier-Lafaye; Laurent Cerutti; Frédéric Genty

doi:10.1117/12.2081595

27 February 2015 Parameter-tolerant design of high contrast gratings

Christyves Chevallier, Nicolas Fressengeas, Joël Jacquet, Guilhem Almuneau, Youness Laaroussi, Olivier Gauthier-Lafaye, Laurent Cerutti, Frédéric Genty

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Proceedings Volume 9372, High Contrast Metastructures IV; 93720N (2015) https://doi.org/10.1117/12.2081595
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.

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Christyves Chevallier, Nicolas Fressengeas, Joël Jacquet, Guilhem Almuneau, Youness Laaroussi, Olivier Gauthier-Lafaye, Laurent Cerutti, and Frédéric Genty "Parameter-tolerant design of high contrast gratings", Proc. SPIE 9372, High Contrast Metastructures IV, 93720N (27 February 2015); https://doi.org/10.1117/12.2081595

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