Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders

Veljko Milanović; Abhishek Kasturi; Bryan Atwood; Yu Su; Kevin Limkrailassiri; John E. Nettleton; Lew Goldberg; Brian J. Cole; Nathaniel Hough

doi:10.1117/12.2082212

27 February 2015 Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders

Veljko Milanović, Abhishek Kasturi, Bryan Atwood, Yu Su, Kevin Limkrailassiri, John E. Nettleton, Lew Goldberg, Brian J. Cole, Nathaniel Hough

Author Affiliations +

Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750H (2015) https://doi.org/10.1117/12.2082212
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

A highly compact and low power consuming Q-switch module was developed based on a fast single-axis MEMS mirror, for use in eye-safe battery-powered laser range finders The module’s 1.6mm x 1.6mm mirror has <99% reflectance at 1535nm wavelength and can achieve mechanical angle slew rates of over 500 rad/sec when switching the Er/Yb:Glass lasing cavity from pumping to lasing state. The design targeted higher efficiency, smaller size, and lower cost than the traditional Electro-Optical Q-Switch. Because pulse-on-demand capability is required, resonant mirrors cannot be used to achieve the needed performance. Instead, a fast point-to-point analog single-axis tilt actuator was designed with a custom-coated high reflectance (HR) mirror to withstand the high intra-cavity laser fluence levels. The mirror is bonded on top of the MEMS actuator in final assembly. A compact MEMS controller was further implemented with the capability of autonomous on-demand operation based on user-provided digital trigger. The controller is designed to receive an external 3V power supply and a digital trigger and it consumes ~90mW during the short switching cycle and ~10mW in standby mode. Module prototypes were tested in a laser cavity and demonstrated high quality laser pulses with duration of ~20ns and energy of over 3mJ.

Citation Download Citation

Veljko Milanović, Abhishek Kasturi, Bryan Atwood, Yu Su, Kevin Limkrailassiri, John E. Nettleton, Lew Goldberg, Brian J. Cole, and Nathaniel Hough "Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750H (27 February 2015); https://doi.org/10.1117/12.2082212

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