Large size MOEMS Fabry-Perot interferometer filter for focal plane array hyperspectral imaging

J. Chee; J. Hwu; T. S. Kim; J. Kubby; S. Velicu; N. Gupta

doi:10.1117/12.2076615

27 February 2015 Large size MOEMS Fabry-Perot interferometer filter for focal plane array hyperspectral imaging

J. Chee, J. Hwu, T. S. Kim, J. Kubby, S. Velicu, N. Gupta

Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750K (2015) https://doi.org/10.1117/12.2076615
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Focal plane array (FPA) technology is mature and is widely used for imaging applications. However, FPAs have broadband responses which limit their ability to provide high performance in hyperspectral applications such as detection of buried explosives, and identifying the presence of explosive chemicals and their concentrations. EPIR is currently developing Micro-Opto-Electro-Mechanical System (MOEMS) Fabry-Perot interferometer filter (FPF) devices for FPAs. In this paper, we present our approach to MOEMS FPF design and fabrication that will meet the size requirements for large format FPA hyperspectral imaging. We also report the performance of our FPF resonance cavity, capable of up to 3 μm change gap in tens of nanometer increments.

Citation Download Citation

J. Chee, J. Hwu, T. S. Kim, J. Kubby, S. Velicu, and N. Gupta "Large size MOEMS Fabry-Perot interferometer filter for focal plane array hyperspectral imaging", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750K (27 February 2015); https://doi.org/10.1117/12.2076615

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