Hydrogen gas sensing using palladium-coated microdisk microresonators

Mustafa Eryurek; Yasin Karadag; Nevin Taşaltın; Necmettin Kilinç; Alper Kiraz

doi:10.1117/12.2078244

3 March 2015 Hydrogen gas sensing using palladium-coated microdisk microresonators

Mustafa Eryurek, Yasin Karadag, Nevin Taşaltın, Necmettin Kilinç, Alper Kiraz

Proceedings Volume 9343, Laser Resonators, Microresonators, and Beam Control XVII; 93430J (2015) https://doi.org/10.1117/12.2078244
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

An SU-8 polymer microdisk resonator coated with a palladium (Pd) layer and coupled to a single-mode optical waveguide is used to as a hydrogen (H₂) gas sensor. In the presence of H₂, a red shift is observed in the spectral positions of the microdisk whispering gallery modes (WGMs) due to the expansion in the Pd lattice. H₂ concentrations below the flammable limit (4%) down to 0.3% could be detected in nitrogen atmosphere at room temperature. For H₂concentrations between 0.3 − 1%, WGM spectral positions shifted linearly with H2 concentration at a rate of 32 pm/%H₂. Average response time of the devices was measured to be 50 s for 1% H₂. The proposed device concept can also be used to detect different chemical gases by using appropriate sensing layers.

Citation Download Citation

Mustafa Eryurek, Yasin Karadag, Nevin Taşaltın, Necmettin Kilinç, and Alper Kiraz "Hydrogen gas sensing using palladium-coated microdisk microresonators", Proc. SPIE 9343, Laser Resonators, Microresonators, and Beam Control XVII, 93430J (3 March 2015); https://doi.org/10.1117/12.2078244

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available