Comparison between e-beam direct write and immersion lithography for 20nm node

Pieter Brandt; Charu Sardana; Dale Ibbotson; Marco Wieland; Aurélien Fay

doi:10.1117/12.2085500

19 March 2015 Comparison between e-beam direct write and immersion lithography for 20nm node

Pieter Brandt, Charu Sardana, Dale Ibbotson, Marco Wieland, Aurélien Fay

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 942311 (2015) https://doi.org/10.1117/12.2085500
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

E-beam Direct Write (EBDW) process window simulations were performed on critical layers in Altera designs of the 20 nm node (minimum metal half-pitch 32 nm). For selected layout clips, a direct comparison is made with 193i simulation results. Local Interconnect and Via0 (single patterning) and Metal1 (Litho-Etch-Litho-Etch (LELE) double patterning) layers are considered. The EBDW dose latitude was found to exceed that of the 193i process by a factor 4. As the electron beam total spot size is of the order of the Critical Dimension (CD) for the considered node, interplay between neighboring features is low. This results in straightforward data preparation with typically 2 kernels and ‘clean’ process windows. The latter are mainly limited by Edge Placement Errors of Line Ends. The curves for the various simulation sites roughly overlap, as opposed to the 193i case in which they differ significantly. In EBDW the performance of square vias equals that of rectangular vias, enabling a denser via packing.

Citation Download Citation

Pieter Brandt, Charu Sardana, Dale Ibbotson, Marco Wieland, and Aurélien Fay "Comparison between e-beam direct write and immersion lithography for 20nm node", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 942311 (19 March 2015); https://doi.org/10.1117/12.2085500

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available