Further advancing the throughput of a multi-beam SEM

Thomas Kemen; Matt Malloy; Brad Thiel; Shawn Mikula; Winfried Denk; Gregor Dellemann; Dirk Zeidler

doi:10.1117/12.2188560

19 March 2015 Further advancing the throughput of a multi-beam SEM

Thomas Kemen, Matt Malloy, Brad Thiel, Shawn Mikula, Winfried Denk, Gregor Dellemann, Dirk Zeidler

Proceedings Volume 9424, Metrology, Inspection, and Process Control for Microlithography XXIX; 94241U (2015) https://doi.org/10.1117/12.2188560
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Multiple electron beam SEMs enable detecting structures of few nanometer in diameter at much higher throughputs than possible with single beam electron microscopes at comparable electron probe parameters. Although recent multiple beam SEM development has already demonstrated a large speed increase¹, higher throughputs are still required to match the needs of many semiconductor applications². We demonstrate the next step in the development of multi-beam SEMs by increasing the number of beams and the current per beam. The modularity of the multi-beam concept ensures that design changes in the multi-beam SEM are minimized.

Citation Download Citation

Thomas Kemen, Matt Malloy, Brad Thiel, Shawn Mikula, Winfried Denk, Gregor Dellemann, and Dirk Zeidler "Further advancing the throughput of a multi-beam SEM", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94241U (19 March 2015); https://doi.org/10.1117/12.2188560

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available