Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

Richa Agrawal; Majid Beidaghi; Wei Chen; Chunlei Wang

doi:10.1117/12.2180122

18 May 2015 Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

Richa Agrawal, Majid Beidaghi, Wei Chen, Chunlei Wang

Proceedings Volume 9493, Energy Harvesting and Storage: Materials, Devices, and Applications VI; 94930C (2015) https://doi.org/10.1117/12.2180122
Event: SPIE Sensing Technology + Applications, 2015, Baltimore, MD, United States

Abstract

The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures.

Citation Download Citation

Richa Agrawal, Majid Beidaghi, Wei Chen, and Chunlei Wang "Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors", Proc. SPIE 9493, Energy Harvesting and Storage: Materials, Devices, and Applications VI, 94930C (18 May 2015); https://doi.org/10.1117/12.2180122

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