High temperature stability of ScxAl1-xN (x=0.27) thin films

P. M. Mayrhofer; A. Bittner; U. Schmid

doi:10.1117/12.2178503

21 May 2015 High temperature stability of Sc_xAl_1-xN (x=0.27) thin films

P. M. Mayrhofer, A. Bittner, U. Schmid

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95171C (2015) https://doi.org/10.1117/12.2178503
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

The stability of piezoelectric scandium aluminium nitride (Sc_xAl_1-xN) thin films with x= 27% was investigated after post deposition annealings up to 1000°C. The Sc_xAl_1-xN thin films targeted for applications in micro-electromechanical systems (MEMS) were deposited close to room-temperature applying DC magnetron sputtering. Varying deposition parameters yielded films with different microstructural properties and piezoelectric constants. Upon annealing, the crystalline quality of thin films with c-axis orientation increased, as found via characterization techniques such as X-ray diffractometry and fourier transform infrared absorbance measurements. Additionally, piezoelectric constants after annealing steps up to 1000°C are reported as obtained via a Berlincourt measurement principle. Furthermore, modifications in chemical composition during temperature loads up to 1000°C were recorded by thermal effusion measurements.

Citation Download Citation

P. M. Mayrhofer, A. Bittner, and U. Schmid "High temperature stability of Sc_xAl_1-xN (x=0.27) thin films", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171C (21 May 2015); https://doi.org/10.1117/12.2178503

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