Differential self-mixing interferometry for micro-cantilever motion sensing

Francisco J. Azcona; Ajit Jha; Carlos Yañez; Santiago Royo

doi:10.1117/12.2184725

22 June 2015 Differential self-mixing interferometry for micro-cantilever motion sensing

Francisco J. Azcona, Ajit Jha, Carlos Yañez, Santiago Royo

Proceedings Volume 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II; 95291B (2015) https://doi.org/10.1117/12.2184725
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

Force sensing is a common practice used for the characterization of matter properties and in particular of bio-materials. Different optical methods have been used in the past to allow high resolution force measurements while avoiding uncertainties induced by external loading of contact sensors. In this paper, we propose the use of differential self-mixing interferometry, a self-aligned, cost effective and compact technique that allows the measurement of displacements with a theoretical resolution in the order of λ/2000 and a practical resolution in the order of λ/200 in practical applications. The DSMI sensor is used to detect the motion of a rectangular cross section cantilever placed on a piezoelectric stage. The measurements were compared with the signal received from the internal piezo stage capacitive sensor, which has a nominal resolution of 2nm. Results show that the DSMI sensor is able to follow accurately the cantilever displacement. A discussion of the potentials, limitations and required further developments of the method will also be presented.

Citation Download Citation

Francisco J. Azcona, Ajit Jha, Carlos Yañez, and Santiago Royo "Differential self-mixing interferometry for micro-cantilever motion sensing", Proc. SPIE 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II, 95291B (22 June 2015); https://doi.org/10.1117/12.2184725

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available