Robust vertical scanning white-light interferometry in close-to-machine applications

Stanislav Tereschenko; Peter Lehmann; Pascal Gollor; Peter Kuehnhold

doi:10.1117/12.2184024

22 June 2015 Robust vertical scanning white-light interferometry in close-to-machine applications

Stanislav Tereschenko, Peter Lehmann, Pascal Gollor, Peter Kuehnhold

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95250Q (2015) https://doi.org/10.1117/12.2184024
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

We present a scanning white-light interferometer (SWLI) for close-to-machine applications in the presence of environmental vibrations. It combines an area measuring white-light interferometer and a punctual measuring laser distance interferometer (LDI) in one device. The measurement spot of the LDI is within the field of view of SWLI. The LDI measures any distance change during the white-light measurement with a high temporal resolution. With the knowledge of the real distance changes during the measurement we can compensate for the influence of environmental vibrations on the white-light correlograms. The reconstruction of the white-light interference signals takes place after measurement by reordering the captured images in accordance with their real positions obtained by the LDI. With this system we are able to reconstruct completely distorted and unusable SWLI signals and to determine the 3D topography of the measurement specimen from these reconstructed signals with high accuracy. We demonstrate the feasibility of the method by examples of practical measurements with and without vibrational disturbances.

Citation Download Citation

Stanislav Tereschenko, Peter Lehmann, Pascal Gollor, and Peter Kuehnhold "Robust vertical scanning white-light interferometry in close-to-machine applications", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95250Q (22 June 2015); https://doi.org/10.1117/12.2184024

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