Industrial interferometry systems for multi-axis measurement

Jindřich Oulehla; Miroslava Holá; Jan Hrabina; Josef Lazar; Ondřej Číp; Miloslav Vychodil; Petr Sedlár; Milan Provaznik

doi:10.1117/12.2190747

22 June 2015 Industrial interferometry systems for multi-axis measurement

Jindřich Oulehla, Miroslava Holá, Jan Hrabina, Josef Lazar, Ondřej Číp, Miloslav Vychodil, Petr Sedlár, Milan Provaznik

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95254M (2015) https://doi.org/10.1117/12.2190747
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta – optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology for processing and polishing of high-precision flat-surface optical components.

Citation Download Citation

Jindřich Oulehla, Miroslava Holá, Jan Hrabina, Josef Lazar, Ondřej Číp, Miloslav Vychodil, Petr Sedlár, and Milan Provaznik "Industrial interferometry systems for multi-axis measurement", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95254M (22 June 2015); https://doi.org/10.1117/12.2190747

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