Towards one trillion positions

Tobias Haist; Marc Gronle; Duc Anh Bui; Bofan Jiang; Christof Pruss; Frederik Schaal; Wolfgang Osten

doi:10.1117/12.2184636

22 June 2015 Towards one trillion positions

Tobias Haist, Marc Gronle, Duc Anh Bui, Bofan Jiang, Christof Pruss, Frederik Schaal, Wolfgang Osten

Proceedings Volume 9530, Automated Visual Inspection and Machine Vision; 953004 (2015) https://doi.org/10.1117/12.2184636
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

How accurately can you determine positions using a non-expensive imaging system? We demonstrate a system, that has the potential to achieve position detections over a large measurement field (200 x 200 mm) for one million times one million 2D positions. Non-expensive telecentric imaging of the large object field is achieved using a large diffractive front element in combination with two small off-the-shelf lenses. The position measurement itself is considerably improved using a simple replication technique: the point to be measured is replicated N-times and the centers of gravity of the N points are averaged. By this approach discretization errors and camera noise are reduced by the square root of the number of points. We describe the system, discuss the error model and show experimental results for the DOE-based telecentric imaging and the position detection sensing.

Citation Download Citation

Tobias Haist, Marc Gronle, Duc Anh Bui, Bofan Jiang, Christof Pruss, Frederik Schaal, and Wolfgang Osten "Towards one trillion positions", Proc. SPIE 9530, Automated Visual Inspection and Machine Vision, 953004 (22 June 2015); https://doi.org/10.1117/12.2184636

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