Shape measurement of micro-objects using a common-path digital holographic microscopy (CDHM) with dual wavelength

Yongfu Wen; Weijuan Qu; Zhaomin Wang; Fang Yang; Chee Yuen Cheng

doi:10.1117/12.2189619

17 July 2015 Shape measurement of micro-objects using a common-path digital holographic microscopy (CDHM) with dual wavelength

Yongfu Wen, Weijuan Qu, Zhaomin Wang, Fang Yang, Chee Yuen Cheng

Author Affiliations +

Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 952422 (2015) https://doi.org/10.1117/12.2189619
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

Digital holography microscopy (DHM) allows fast, nondestructive, high resolution and full-field 3D shape measurement of micro-objects. However, a drawback of many experimental arrangements of DHM is the requirement for a separate reference wave, which results in a measurement stability and interference fringe contrast decrease. In this paper, a common-path DHM (CDHM) is explored which only requires a single object illumination wave. Due to the fact that conventional phase unwrapping algorithms are not suitable for the complex and step surface of object, the dual wavelength linear regression phase unwrapping algorithm is introduced. By comparing two wrapped phase maps reconstructed at different wavelengths, the maps can be accurately unwrapped with straightforward and less timeconsuming. From the CDHM system and the phase unwrapping algorithm introduced, we experimentally obtained high quality depth profiles of micro-objects.

Citation Download Citation

Yongfu Wen, Weijuan Qu, Zhaomin Wang, Fang Yang, and Chee Yuen Cheng "Shape measurement of micro-objects using a common-path digital holographic microscopy (CDHM) with dual wavelength", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952422 (17 July 2015); https://doi.org/10.1117/12.2189619

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